THIN FILM CONSULTING provides the novel high-speed FloTron™ plasma emission monitoring (PEM) system for process monitoring and real time in-situ control of reactive sputtering, ion- and plasma processing.
In a reactive sputtering process a metalllic target is sputtered in the presence of a reactive gas that will react with the target material to form a coating of different chemical composition. The FloTron™ system enables a stabilized working point in the potentially unstable “transition” regime between metallic and fully oxidized sputtering mode.
Working in the transitions region increases efficiency and economy of thin film production. It features:
- higher deposition rate by a factor of 2 - 4
- better process stability and repeatability
- improved film properties
- fine tuned chemical composition
- better control of uniformity
Applications: R&D processes with a high speed and high resolution spectrometer
- industrial coating deposition for Roll-to-Roll- or Inline-Coaters
- reactive magnetron sputtering
- reactive HiPIMS sputtering
- reactive arc evaporation
- reactive evaporation with electron beam guns
FloTron™: An outstanding reactive sputtering process control system:
- innovative and fast pseudo derivative feedback (PDF) control algorithm
- simple, intuitive Graphical User interface (GUI) free of charge
- fast and easy integration via PROFIBUS, PROFINET, Ethernet/IP ...
- economic single wavelength Photomultiplier (PMT) based sensor
- multi-wavelength CCD-Spectrometer based sensor
FloTron™ offers a flexible sensor concept that fits almost any need and budget:
- PEM “Single wavelength”: PMT + narrow-band-pass filter
- PEM “Broadband/multiple wavelength”: CCD/CMOS Spectrometer
- Sputtering Target Voltage (plasma discharge impedance)
- Partial pressure (p.p.) of reactive gas (e.g. O2 via Lambda-Sensor)
Benefits from FloTron™
- better run-to-run repeatability
- enhanced productivity
- improved machine economy
- process quality data logging
- maintain film properties for whole target life
- system implementation with onsite- or remote support
- customer training