IONIX® 8'' HV Circular Sputtering Source

The IONIX® IX8 has a target diameter of 203.2 mm (8'') and can be used with non-magnetic targets varying from 6 - 14 mm in small scale production systems. Optionally targets of 200 mm diameter can be used.

The IX8 features indirect cooling of the target. The modular magnet array is completely isolated from the cooling water. A sliding anode allows easy adjustment of the dark space gap when varying target thickness.

Via the ISO63 interface the sputtering source can be mounted on a straight Ø1'' tube. Also ISO or CF flange mounted sources are available.

Features

  • internal mounting with ISO63 interface
  • target diameter 8" (203.2 mm)
  • targets 6 - 14 mm thick, non-magnetic
  • indirectly cooled targets
  • water tubes Ø6xØ4 mm
  • magnet array completely isolated from cooling water
  • for DC, AC, RF and pulsed operation
  • water tubes Ø6xØ4 mm

Technical data

Target   Dimensions  
form circular/planar diameter 255 mm
diameter 8" (203.2 mm) ± 0.5mm height 75 mm
thickness 6 - 14 mm Mounting tube Ø1" x 300 mm
cooling indirect ***
   ISO 63
Working pressure argon Construction materials stainless steel
OFHC - type copper
PFTE
nonmagnetic targets 3x10-3- 10-1 mbar Cooling water  
best performance 5x10-3-5x10-2mbar flow 0.5 ... 1 l / (min x kW)
Typical rates   max. inlet temperature ≤ 30°C
Ti, 75 mm distance 11 Å/s @ 2000W max. pressure ≤ 2 bar open drain
Cu, 200 mm distance 13 Å/s @ 2000W Ø tubing Ø6xØ4 mm PTFE
Electrical specifications   Magnet array permanent NdFeB
max. power, watts DC 10 kW DC* max. temperature 60°C
max. power, watts RF 5 kW RF* Accessories and options  
max. current DC 25 A - quick coupling f/t - chimney option
max. voltage DC 1000 V - gas inlet option - flange mounting
connector DC screw terminal
    
connector RF type 7/16 **    
* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.
*** Direct cooling on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

Mounting options

  • Chimney
  • Gas distribution
  • Quick coupling feedtrough
  • Z-Manipulator
  • ISO or CF flange mounting option

Dimensions

Dimensions for IX8 magnetron assembly consisting of sputtering source with chimney, quick coupling feedtrough available for Ø32 mm bore (OD 1'' tube)