IONIX® 1'' UHV Circular Sputtering Source
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IX1U is the smallest IONIX® ultrahigh vacuum magnetron sputtering source with target diameter of 25.4 mm (1'') used in thin film research and development. The target thickness can vary from 1 to 3 mm for non-ferromagnetic targets. The IX1U features indirect cooling of the target and a sliding anode allowing easy adjustment of the dark space gap when varying target thickness. Optionally a magnet array for magnetic target materials (Fe 0.9 mm, Ni 3 mm with profiles) is available or can be retrofitted later. |
Features
- internal mounting with CF interface
- target diameter 1" (25.4 mm)
- targets 1 - 3 mm thick, non-magnetic
- magnetic targets Ni 3 with profiles, Fe 0.9 mm thick
- indirectly cooled targets
- magnet array completely isolated from cooling water
- for DC, AC, RF and pulsed operation
- water tubes Ø6xØ4 mm
Technical data
| Target | Dimensions | ||
| form | circular/planar | diameter | 44 mm |
| diameter | 1" (25,4 mm) ± 0,1mm | height | 64 mm (86 mm) |
| thickness | 1 - 3 mm | Mounting | tube Ø1" x 300 mm |
| cooling | indirect *** |
DN 16 CF | |
| Working pressure | argon | Construction materials | stainless steel OFHC - type copper Al2O3 |
| nonmagnetic targets | 6x10-3- 5x10-2 mbar | Cooling water | |
| best performance | 5x10-3-1,5x10-2mbar | flow | 1 l / (min x kW) |
| Typical rates | max. inlet temperature | ≤ 30°C | |
| Cu, 7 cm distance | 15 Å/s @ 100W | max. pressure | ≤ 2 bar open drain |
| Ø tubing | Ø6xØ4 mm PTFE | ||
| Electrical specifications | Magnet array | permanent SmCO |
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| max. power, watts DC | 100 W DC | max. temperature | 200°C |
| max. power, watts RF | 100 W RF | Accessories and options | |
| max. current DC | 5 A | - quick coupling f/t | - ±45° flexible tilt |
| max. voltage DC | 1200 V | - ferromagnetic materials | - 40° insitu tilt |
| connector DC | type N | - gas inlet option | - chimney option |
| connector RF | type 7/16 ** | - pneumatic shutter | - flange mounting |
| * This value refers to the magnetron itself. The maximum power is determined by the target material and its bonding or clamping technique. ** RF-Version requires special connector and/or installation. More details on request. *** Direct cooling on request. 
We reserve the right for technical changes in design and specifications without notice or obligations. |
Mounting options
- Chimney
- +/- 45° tilt or 40° insitu-tilt
- Pneumatic, electric or manual shutter
- Gas distribution
- Quick coupling feedtrough
- Z-Manipulator
- Flange mounting option
Dimensions
Dimensions for IX1U flange assembly consisting of sputtering source with chimney, tilt, pneumatic shutter and gas distribution on DN63CF