IONIX® 10'' HV Circular Sputtering Source
The IONIX® IX10 has a target diameter of 254.0 mm (10'') and can be used with non-magnetic targets varying from 8 - 16 mm in small scale production systems. Optionally targets of 250 mm diameter can be used. The achievable film thickness homogeneity is ±5% on Ø150 mm substrates for selected materials, best distance will be between 50 - 120 mm and must be optimized for each sputtering target material.
The IX10 features indirect cooling of the target. The modular magnet array is completely isolated from the cooling water. A sliding anode allows easy adjustment of the dark space gap when varying target thickness. Optionally a version with a magnet array for 6 mm thick Ni targets is available.
Via the ISO63 interface the sputtering source can be mounted on a straight Ø1''. Also ISO or CF flange mounted sources are available.
Features
- internal mounting with ISO63 interface
- target diameter 10" (254 mm)
- targets 8 - 16 mm thick, non-magnetic
- optionally: magnetic targets Ni 6 mm
- indirectly cooled targets
- magnet array completely isolated from cooling water
- for DC, AC, RF and pulsed operation
- water tubes Ø8xØ6 mm
Technical data
| Target | Dimensions | ||
| form | circular/planar | diameter | 294 mm |
| diameter | 10" (254 mm) ± 0.5mm | height | 80 mm |
| thickness | 8 - 16 mm | Mounting | tube Ø1" x 300 mm |
| cooling | indirect *** |
ISO63 | |
| Working pressure | argon | Construction materials | stainless steel OFHC - type copper PFTE |
| nonmagnetic targets | 3x10-3- 10-1 mbar | Cooling water | |
| best performance | 5x10-3-5x10-2mbar | flow | 0.5 ... 1 l / (min x kW) |
| Typical rates | max. inlet temperature | ≤ 30°C | |
| Ti, 75 mm distance | 35 Å/s @ 5000W | max. pressure | ≤ 2 bar open drain |
| Al, 75 mm distance | 60 Å/s @ 5000W | Ø tubing | Ø10xØ8 mm PTFE |
| Electrical specifications | Magnet array | permanent NdFeB | |
| max. power, watts DC | 15 kW DC* | max. temperature | 60°C |
| max. power, watts RF | 5 kW RF* | Accessories and options | |
| max. current DC | 25 A | - quick coupling f/t | - chimney option |
| max. voltage DC | 1000 V | - gas inlet option | - flange mounting |
| connector DC | screw terminal |
||
| connector RF | type 7/16 ** |
| * This value refers to the magnetron itself. The maximum power is determined by the target material and its bonding or clamping technique. ** RF-Version requires special connector and/or installation. More details on request. *** Direct cooling on request. 
We reserve the right for technical changes in design and specifications without notice or obligations. |
Mounting options
- Chimney
- Gas distribution
- Quick coupling feedtrough
- Z-Manipulator
- ISO or CF flange mounting option
Dimensions
Dimensions for IX10 magnetron assembly consisting of sputtering source with chimney, quick coupling feedtrough available for Ø32 mm bore (OD 1'' tube)
