IONIX® Interface Options
High voltage power and cooling water lines need to be routed from the magnetron terminals to atmosphere. Standardized interfaces allow the use of standardized vacuum components like bellows, reducers, etc. We recommend the use ISO63 as vacuum interface.
Apart from that interface, a wide variety of different interfaces are available for IONIX® rectangular magnetrons sputtering sources to virtually fit all vacuum system constraints, vacuum environments and customer requirements.
ISO63 interface
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| Example with conical reducer | Example with a fixed adapter length |
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CF-type interfaces
