IONIX® 4'' HV Circular Sputtering Source
The IONIX® IX4 has a target diameter of 101.6 mm (4'') and can be used with non-magnetic targets varying from 4 - 10 mm.
The IX4 features indirect cooling of the target, a sliding anode allows easy adjustment of the dark space gap with varying target thickness. Optionally a magnet array for magnetic target materials ( for 6 mm Ni, 3 mm Fe) is available or can be retrofitted later.
Via the DN25KF interface the sputtering source can be either mounted on a straight Ø1'' or Ø3/4'' tube or on a tilt. Also ISO or CF flange mounted sources are available.
Features
- internal mounting with DN25KF interface
- target diameter 4" (101.6 mm)
- targets 4 - 10 mm thick, non-magnetic
- optionally: magnetic targets Ni 6 mm, Fe 3 mm thick
- indirectly cooled targets
- water tubes Ø6xØ4 mm
- magnet array completely isolated from cooling water
- for DC, AC, RF and pulsed operation
- water tubes Ø6xØ4 mm
Technical data
| Target | Dimensions | ||
| form | circular/planar | diameter | 132 mm |
| diameter | 4" (101.6 mm) ± 0.25mm | height | 60 mm |
| thickness | 4 - 10 mm | Mounting | tube Ø1" x 300 mm |
| cooling | indirect *** |
DN 25 KF | |
| Working pressure | argon | Construction materials | stainless steel OFHC - type copper PFTE |
| nonmagnetic targets | 3x10-3- 10-1 mbar | Cooling water | |
| best performance | 5x10-3-5x10-2mbar | flow | 1 l / (min x kW) |
| Typical rates | max. inlet temperature | ≤ 30°C | |
| Mo, 200 mm distance | 7 Å/s @ 1000W | max. pressure | ≤ 2 bar open drain |
| Cu, 200 mm distance | 20 Å/s @ 1000W | Ø tubing | Ø6xØ4 mm PTFE |
| Electrical specifications | Magnet array | permanent NdFeB | |
| max. power, watts DC | 3000 W DC* | max. temperature | 60°C |
| max. power, watts RF | 1500 W RF* | Accessories and options | |
| max. current DC | 10 A | - quick coupling f/t | - ±45° flexible tilt |
| max. voltage DC | 1000 V | - ferromagnetic materials | - 40° insitu tilt |
| connector DC | type N | - gas inlet option | - chimney option |
| connector RF | type 7/16 ** | - pneumatic shutter | - flange mounting |
| * This value refers to the magnetron itself. The maximum power is determined by the target material and its bonding or clamping technique. ** RF-Version requires special connector and/or installation. More details on request. *** Direct cooling on request. 
We reserve the right for technical changes in design and specifications without notice or obligations. |
Mounting options
- with or without Chimney
- +/- 45° tilt or 40° insitu-tilt
- straight tube, OD 1'' or OD 3/4''
- Pneumatic, electric or manual shutter
- Gas distribution
- Quick coupling feedtrough
- Z-Manipulator
- ISO or CF flange mounting option
Dimensions
Dimensions for IX4 flange assembly consisting of sputtering source with chimney, tilt, pneumatic shutter and gas distribution on DN160ISO-K
Dimensions for IX4 magnetron assembly consisting of sputtering source with chimney, quick coupling feedtrough available either for Ø32 mm or Ø25.4 mm bore (OD 1'' or OD 3/4'' tube)
