IONIX® 12'' UHV Circular Sputtering Source
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IONIX® 10'' UHV Circular Sputtering Source
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IONIX® 6'' UHV Circular Sputtering Source
The IONIX® IX6U magnetron sputtering source has a target diameter of 152.4 mm (6'') and can be used with non-ferromagnetic targets varying from 6 - 12 mm thickness. The magnetron features indirect cooling of the target, discrete target clamping and a sliding anode allowing easy adjustment of the dark space gap when varying target thickness.
The IX6U has a fully UHV compatible design utilizing only metallic seals and construction materials with low-outgassing rate. The IX6U is bakeable up to 200°C with its SmCo magnet array inserted and can be in DC, AC, RF and pulsed operation.
Optionally a version with a magnet array for ferromagnetic target materials ( Ni 4 mm, Fe 2 mm thick) is available. The IX6U can be either internally mounted via DN100CF interface or directly flange mounted on a DN200CF flange.
Features
- internal mounting with DN100CF interface
- target diameter 6" (152.4 mm)
- targets 6 - 12 mm thick, non-magnetic
- magnetic targets: Ni 4 mm, Fe 2 mm thick
- indirectly cooled targets
- magnet array completely isolated from cooling water
- for DC, AC, RF and pulsed operation
- water tubes Ø8xØ6 mm
Technical data
| Target | Dimensions | ||
| form | circular/planar | diameter | 194 mm |
| diameter | 6" (152.4 mm) ± 0.25mm | height | 103 mm |
| thickness | 6 - 12 mm | Mounting | tube Ø1" x 300 mm |
| cooling | indirect *** |
DN 100 CF | |
| Working pressure | argon | Construction materials | stainless steel OFHC - type copper Al2O3 |
| nonmagnetic targets | 3x10-3- 10-1 mbar | Cooling water | |
| best performance | 5x10-3-5x10-2mbar | flow | 1 l / (min x kW) |
| Typical rates | max. inlet temperature | ≤ 30°C | |
| Mo, 150 mm distance | 8 Å/s @ 1000W | max. pressure | ≤ 2 bar open drain |
| Cu, 150 mm distance | 24 Å/s @ 1000W | Ø tubing | Ø8xØ6 mm PTFE |
| Electrical specifications | Magnet array | permanent SmCo | |
| max. power, watts DC | 3500 W DC* | max. temperature | 200°C |
| max. power, watts RF | 1500 W RF* | Accessories and options | |
| max. current DC | 10 A | - quick coupling f/t | - chimney option |
| max. voltage DC | 1000 V | - ferromagnetic materials | - flange mounting |
| connector DC | type N | - gas inlet option | |
| connector RF | type 7/16 ** |
| * This value refers to the magnetron itself. The maximum power is determined by the target material and its bonding or clamping technique. ** RF-Version requires special connector and/or installation. More details on request. *** Direct cooling on request. 
We reserve the right for technical changes in design and specifications without notice or obligations. |
Mounting options
- Chimney
- Gas distribution
- Quick coupling feedtrough
- Z-Manipulator
- CF flange mounting option
Dimensions
On request
IONIX® 8'' UHV Circular Sputtering Source
The IONIX® IX8U magnetron sputtering source has a target diameter of 200 mm (8'') and can be used with non-ferromagnetic targets varying from 6 -14 mm thickness. The magnetron features indirect cooling of the target, discrete target clamping and a sliding anode allowing easy adjustment of the dark space gap when varying target thickness.
The IX8U has a fully UHV compatible design utilizing only metallic seals and construction materials with low-outgassing rate. The IX8U is bakeable up to 200°C with its SmCo magnet array inserted and can be in DC, AC, RF and pulsed operation.
The IX8U can be either internally mounted via DN100CF interface or directly flange mounted on a DN250CF flange.
Features
- internal mounting with DN100CF interface
- target diameter 8" (200 mm)
- targets 6 - 14 mm thick, non-magnetic
- indirectly cooled targets
- magnet array completely isolated from cooling water
- for DC, AC, RF and pulsed operation
- water tubes Ø6xØ4 mm
Technical data
| Target | Dimensions | ||
| form | circular/planar | diameter | 243 mm |
| diameter | 8" (200 mm) ± 0.25mm | height | 117 mm |
| thickness | 6 - 14 mm | Mounting | tube Ø1" x 300 mm |
| cooling | indirect *** |
DN 100 CF | |
| Working pressure | argon | Construction materials | stainless steel OFHC - type copper Al2O3 |
| nonmagnetic targets | 3x10-3- 10-1 mbar | Cooling water | |
| best performance | 5x10-3-5x10-2mbar | flow | 0.5 ... 1 l / (min x kW) |
| Typical rates | max. inlet temperature | ≤ 30°C | |
| Ti, 75 mm distance | 11 Å/s @ 2000W | max. pressure | ≤ 2 bar open drain |
| Cu, 200 mm distance | 13 Å/s @ 2000W | Ø tubing | Ø8xØ6 mm PTFE |
| Electrical specifications | Magnet array | permanent SmCo | |
| max. power, watts DC | 6000 W DC* | max. temperature | 200°C |
| max. power, watts RF | 3000 W RF* | Accessories and options | |
| max. current DC | 10 A | - quick coupling f/t | - chimney option |
| max. voltage DC | 1000 V | - ferromagnetic materials | - flange mounting |
| connector DC | type N | - gas inlet option | |
| connector RF | type 7/16 ** |
| * This value refers to the magnetron itself. The maximum power is determined by the target material and its bonding or clamping technique. ** RF-Version requires special connector and/or installation. More details on request. *** Direct cooling on request.
We reserve the right for technical changes in design and specifications without notice or obligations. |
Mounting options
- Chimney
- Gas distribution
- Quick coupling feedtrough
- Z-Manipulator
- CF flange mounting option
Dimensions
On request
IONIX® 5'' UHV Circular Sputtering Source
The IONIX® IX5U magnetron sputtering source has a target diameter of 127 mm (5'') and can be used with non-ferromagnetic targets varying from 4 -12 mm thickness. The magnetron features indirect cooling of the target, discrete target clamping and a sliding anode allowing easy adjustment of the dark space gap when varying target thickness.
The IX5U has a fully UHV compatible design utilizing only metallic seals and construction materials with low-outgassing rate. The IX5U is bakeable up to 200°C with its SmCo magnet array inserted and can be in DC, AC, RF and pulsed operation.
Optionally a version with a magnet array for ferromagnetic target materials ( Ni 4 mm, Fe 2 mm thick) is available. The IX5U can be either internally mounted via DN63CF interface or directly flange mounted on a DN200CF flange.
Features
- internal mounting with DN63CF interface
- target diameter 5" (127 mm)
- targets 4 - 12 mm thick, non-magnetic
- magnetic targets: Ni 4 mm, Fe 2 mm thick
- indirectly cooled targets
- magnet array completely isolated from cooling water
- for DC, AC, RF and pulsed operation
- water tubes Ø6xØ4 mm
Technical data
| Target | Dimensions | ||
| form | circular/planar | diameter | 170 mm |
| diameter | 5" (127 mm) ± 0.25mm | height | 105 mm |
| thickness | 4 - 12 mm | Mounting | tube Ø1" x 300 mm |
| cooling | indirect *** |
DN 63 CF | |
| Working pressure | argon | Construction materials | stainless steel OFHC - type copper Al2O3 |
| nonmagnetic targets | 3x10-3- 10-1 mbar | Cooling water | |
| best performance | 5x10-3-5x10-2mbar | flow | 1 l / (min x kW) |
| Typical rates | max. inlet temperature | ≤ 30°C | |
| Al, 100 mm distance | 16 Å/s @ 2500W | max. pressure | ≤ 2 bar open drain |
| Cu, 100 mm distance | 32 Å/s @ 2500W | Ø tubing | Ø6xØ4 mm PTFE |
| Electrical specifications | Magnet array | permanent SmCo | |
| max. power, watts DC | 2500 W DC* | max. temperature | 200°C |
| max. power, watts RF | 1250 W RF* | Accessories and options | |
| max. current DC | 10 A | - quick coupling f/t | - ±45° flexible tilt |
| max. voltage DC | 1000 V | - ferromagnetic materials | - 40° insitu tilt |
| connector DC | type N | - gas inlet option | - chimney option |
| connector RF | type 7/16 ** | - pneumatic shutter | - flange mounting |
| * This value refers to the magnetron itself. The maximum power is determined by the target material and its bonding or clamping technique. ** RF-Version requires special connector and/or installation. More details on request. *** Direct cooling on request.
We reserve the right for technical changes in design and specifications without notice or obligations. |
Mounting options
- Chimney
- +/- 45° tilt or 40° insitu-tilt
- Pneumatic, electric or manual shutter
- Gas distribution
- Quick coupling feedtrough
- Z-Manipulator
- CF flange mounting option
Dimensions
On request