IONIX® 12'' HV Circular Sputtering Source
The IONIX® IX12 has a target diameter of 304.8 mm (12'') and can be used with non-magnetic targets varying from 8 - 16 mm in small scale production systems. Optionally targets of 300 mm diameter can be used. The achievable film thickness homogeneity is ±3% on Ø200 mm substrates for selected materials, best distance will be between 50 - 120 mm and must be optimized for each sputtering target material.
The IX12 features indirect cooling and an adjustable anode shield that allows easy adjustment of the dark space gap when varying target thickness. The magnetron can be either used with targets of clamp or bond design.
Via the ISO63 interface the sputtering source can be mounted on a straight Ø1.25''. Also ISO or CF flange mounted sources are available.
Features
- internal mounting with ISO63 interface
- flange mounting with ISO400-K interfance
- target diameter 12" (304.8 mm)
- targets 8 - 16 mm thick, non-magnetic
- indirectly cooled targets
- magnet array completely isolated from cooling water
- for DC, AC, RF and pulsed operation
- water tubes Ø10xØ8 mm
Technical data
| Target | Dimensions | ||
| form | circular/planar | diameter | 346 mm |
| diameter | 12" (304.8 mm) ± 0.5mm | height | 80 mm |
| thickness | 8 - 16 mm | Mounting | tube Ø1,25" x 300 mm |
| cooling | indirect *** |
ISO63 |
|
| Working pressure | argon | Construction materials | stainless steel OFHC - type copper PFTE |
| nonmagnetic targets | 3x10-3- 10-1 mbar | Cooling water | |
| best performance | 5x10-3-5x10-2mbar | flow | 0.5 ... 1 l / (min x kW) |
| Typical rates | max. inlet temperature | ≤ 30°C | |
| Ti, 80 mm distance | 30 Å/s @ 7000W | max. pressure | ≤ 2 bar open drain |
| Al, 100 mm distance | 50 Å/s @ 7000W | Ø tubing | Ø10xØ8 mm PTFE |
| Electrical specifications | Magnet array | permanent NdFeB | |
| max. power, watts DC | 14 kW DC* | max. temperature | 60°C |
| max. power, watts RF | 5 kW RF* | Accessories and options | |
| max. current DC | 5 A | - quick coupling f/t | - chimney option |
| max. voltage DC | 1000 V | - gas inlet option | - flange mounting |
| connector DC | screw terminal |
||
| connector RF | type 7/16 ** |
| * This value refers to the magnetron itself. The maximum power is determined by the target material and its bonding or clamping technique. ** RF-Version requires special connector and/or installation. More details on request. *** Direct cooling on request. 
We reserve the right for technical changes in design and specifications without notice or obligations. |
Mounting options
- Chimney
- Gas distribution
- Quick coupling feedtrough
- ISO or CF flange mounting option
Dimensions
Dimensions for IX12 magnetron assembly consisting of sputtering source with quick coupling feedtrough available for Ø40 mm bore (OD 1.25'' tube)
