IONIX® 6'' HV Circular Sputtering Source
The IONIX® IX6 has a target diameter of 152.4 mm (6'') and can be used with non-magnetic targets varying from 4 - 12 mm in small scale production systems. Optionally targets of 150 mm diameter can be used.
The IX6 features indirect cooling of the target. The modular magnet array is completely isolated from the cooling water. A sliding anode allows easy adjustment of the dark space gap when varying target thickness. Optionally a magnet array for magnetic target materials ( for 4 mm Ni, 2 mm Fe) is available or can be retrofitted later.
Via the DN50KF interface the sputtering source can be mounted on a straight Ø1'' tube or on a tilt. Also ISO or CF flange mounted sources are available.
- internal mounting with DN50KF interface
- target diameter 6" (152.4 mm)
- targets 4 - 12 mm thick, non-magnetic
- magnetic targets Ni 4 mm, Fe 2 mm thick
- indirectly cooled targets
- magnet array completely isolated from cooling water
- for DC, AC, RF and pulsed operation
- water tubes Ø6xØ4 mm
Technical data
Target | Dimensions | ||
form | circular/planar | diameter | 192 mm |
diameter | 6" (152.4 mm) ± 0.5mm | height | 70 mm |
thickness | 6 - 12 mm | Mounting | tube Ø1" x 300 mm |
cooling | indirect *** |
DN 25 KF | |
Working pressure | argon | Construction materials | stainless steel OFHC - type copper PFTE |
nonmagnetic targets | 3x10-3- 10-1 mbar | Cooling water | |
best performance | 5x10-3-5x10-2mbar | flow | 1 l / (min x kW) |
Typical rates | max. inlet temperature | ≤ 30°C | |
Mo, 150 mm distance | 8 Å/s @ 1000W | max. pressure | ≤ 2 bar open drain |
Cu, 150 mm distance | 24 Å/s @ 1000W | Ø tubing | Ø6xØ4 mm PTFE |
Electrical specifications | Magnet array | permanent NdFeB | |
max. power, watts DC | 6000 W DC* | max. temperature | 60°C |
max. power, watts RF | 3000 W RF* | Accessories and options | |
max. current DC | 15 A | - quick coupling f/t | - ±45° flexible tilt |
max. voltage DC | 1000 V | - ferromagnetic materials | - 40° insitu tilt |
connector DC | type N | - gas inlet option | - chimney option |
connector RF | type 7/16 ** | - pneumatic shutter | - flange mounting |
* This value refers to the magnetron itself. The maximum power is determined by the target material and its bonding or clamping technique. ** RF-Version requires special connector and/or installation. More details on request. *** Direct cooling on request. ![]() We reserve the right for technical changes in design and specifications without notice or obligations. |
Mounting options
- with or without Chimney
- +/- 45° tilt or 40° insitu-tilt
- straight tube, OD 1'' or OD 3/4''
- Pneumatic, electric or manual shutter
- Gas distribution
- Quick coupling feedtrough
- Z-Manipulator
- ISO or CF flange mounting option
Dimensions
Dimensions for IX6 flange assembly consisting of sputtering source with chimney, tilt, pneumatic shutter and gas distribution on DN200ISO-K
Dimensions for IX6 magnetron assembly consisting of sputtering source with chimney, quick coupling feedtrough available for Ø32 mm bore (OD 1'' tube)