IONIX® 8'' UHV Circular Sputtering Source

The IONIX® IX8U magnetron sputtering source has a target diameter of  200 mm (8'') and can be used with non-ferromagnetic targets varying from 6 -14 mm thickness. The magnetron features indirect cooling of the target, discrete target clamping and a sliding anode allowing easy adjustment of the dark space gap when varying target thickness.

The IX8U has a fully UHV compatible design utilizing only metallic seals and construction materials with low-outgassing rate. The IX8U is bakeable up to 200°C with its SmCo magnet array inserted and can be in DC, AC, RF and pulsed operation.

The IX8U can be either internally mounted via DN100CF interface or directly flange mounted on a DN250CF flange.


  • internal mounting with DN100CF interface
  • target diameter 8" (200 mm)
  • targets 6 - 14 mm thick, non-magnetic
  • indirectly cooled targets
  • magnet array completely isolated from cooling water
  • for DC, AC, RF and pulsed operation
  • water tubes Ø6xØ4 mm

Technical data

Target   Dimensions  
form circular/planar diameter 243 mm
diameter 8" (200 mm) ± 0.25mm height 117 mm
thickness 6 - 14 mm Mounting tube Ø1" x 300 mm
cooling indirect ***
  DN 100 CF
Working pressure argon Construction materials stainless steel
OFHC - type copper
nonmagnetic targets 3x10-3- 10-1 mbar Cooling water  
best performance 5x10-3-5x10-2mbar flow 0.5 ... 1 l / (min x kW)
Typical rates   max. inlet temperature ≤ 30°C
Ti, 75 mm distance 11 Å/s @ 2000W max. pressure ≤ 2 bar open drain
Cu, 200 mm distance 13 Å/s @ 2000W Ø tubing Ø8xØ6 mm PTFE
Electrical specifications   Magnet array permanent SmCo
max. power, watts DC 6000 W DC* max. temperature 200°C
max. power, watts RF 3000 W RF* Accessories and options  
max. current DC 10 A - quick coupling f/t - chimney option
max. voltage DC 1000 V - ferromagnetic materials - flange mounting
connector DC type N - gas inlet option  
connector RF type 7/16 **    
* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.
*** Direct cooling on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

Mounting options

  • Chimney
  • Gas distribution
  • Quick coupling feedtrough
  • Z-Manipulator
  • CF flange mounting option


On request

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