IONIX® 8'' HV Circular Sputtering Source
The IONIX® IX8 has a target diameter of 203.2 mm (8'') and can be used with non-magnetic targets varying from 6 - 14 mm in small scale production systems. Optionally targets of 200 mm diameter can be used.
The IX8 features indirect cooling of the target. The modular magnet array is completely isolated from the cooling water. A sliding anode allows easy adjustment of the dark space gap when varying target thickness.
Via the ISO63 interface the sputtering source can be mounted on a straight Ø1'' tube. Also ISO or CF flange mounted sources are available.
Features
- internal mounting with ISO63 interface
- target diameter 8" (203.2 mm)
- targets 6 - 14 mm thick, non-magnetic
- indirectly cooled targets
- water tubes Ø6xØ4 mm
- magnet array completely isolated from cooling water
- for DC, AC, RF and pulsed operation
- water tubes Ø6xØ4 mm
Technical data
| Target | Dimensions | ||
| form | circular/planar | diameter | 255 mm |
| diameter | 8" (203.2 mm) ± 0.5mm | height | 75 mm |
| thickness | 6 - 14 mm | Mounting | tube Ø1" x 300 mm |
| cooling | indirect *** |
ISO 63 | |
| Working pressure | argon | Construction materials | stainless steel OFHC - type copper PFTE |
| nonmagnetic targets | 3x10-3- 10-1 mbar | Cooling water | |
| best performance | 5x10-3-5x10-2mbar | flow | 0.5 ... 1 l / (min x kW) |
| Typical rates | max. inlet temperature | ≤ 30°C | |
| Ti, 75 mm distance | 11 Å/s @ 2000W | max. pressure | ≤ 2 bar open drain |
| Cu, 200 mm distance | 13 Å/s @ 2000W | Ø tubing | Ø6xØ4 mm PTFE |
| Electrical specifications | Magnet array | permanent NdFeB | |
| max. power, watts DC | 10 kW DC* | max. temperature | 60°C |
| max. power, watts RF | 5 kW RF* | Accessories and options | |
| max. current DC | 25 A | - quick coupling f/t | - chimney option |
| max. voltage DC | 1000 V | - gas inlet option | - flange mounting |
| connector DC | screw terminal |
||
| connector RF | type 7/16 ** |
| * This value refers to the magnetron itself. The maximum power is determined by the target material and its bonding or clamping technique. ** RF-Version requires special connector and/or installation. More details on request. *** Direct cooling on request. 
We reserve the right for technical changes in design and specifications without notice or obligations. |
Mounting options
- Chimney
- Gas distribution
- Quick coupling feedtrough
- Z-Manipulator
- ISO or CF flange mounting option
Dimensions
Dimensions for IX8 magnetron assembly consisting of sputtering source with chimney, quick coupling feedtrough available for Ø32 mm bore (OD 1'' tube)
